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Trade accounts receivable, net Trade Accounts Receivable, Current Trade Accounts Receivable, Current Vested (usd per share) Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value Non-NEOs Non-NEOs [Member] Income Tax Holiday [Line Items] Income Tax Contingency [Line Items] Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation, Calculation [Roll Forward] Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation, Calculation [Roll Forward] Financing activities: Net Cash Provided by (Used in) Financing Activities [Abstract] Non-PEO NEO Non-PEO NEO [Member] Adjustment to Compensation: Adjustment to Compensation [Axis] Exercise Price Range 8 Range Eight [Member] Range Eight Net decrease in fair value Changes in fair value Equity Securities without Readily Determinable Fair Value, Unrealized Gain (Loss) Equity Securities without Readily Determinable Fair Value, Unrealized Gain (Loss) Research and development credit carryforwards Research and development credits Deferred Tax Assets, Tax Credit Carryforwards, Research Net operating losses Deferred Tax Assets, Operating Loss Carryforwards Contract assets Contract with Customer, Asset, after Allowance for Credit Loss Basic (shares) Weighted-average shares outstanding used in basic calculation (shares) Weighted Average Number of Shares Outstanding, Basic Property, plant, and equipment Deferred Tax Liabilities, Property, Plant and Equipment Computer and office equipment Computer And Office Equipment Carrying amount as of balance sheet date of long-lived, depreciable asset used in production process to produce goods and services. Concentration Risk Benchmark [Axis] Concentration Risk Benchmark [Axis] Revenue: Revenues [Abstract] Systems Systems [Member] Systems [Member] Foreign Currency and Other Hedging Instruments Foreign Currency And Other Hedging Instruments Policy [Policy Text Block] Accounting policy on foreign currency remeasurement and retranslation. Accounting policy on hedging instruments. Cash received from option exercises and employee stock purchase plans Proceeds, Issuance of Shares, Share-Based Payment Arrangement, Including Option Exercised Operating lease revenue Operating Lease, Lease Income Pay vs Performance Disclosure Pay vs Performance Disclosure [Table] Statement [Line Items] Statement [Line Items] Gross interest related to unrecognized tax benefits accrued Unrecognized Tax Benefits, Interest on Income Taxes Accrued Number of options vested and expected to vest Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Vested and Expected to Vest, Outstanding, Number Intangible assets Deferred Tax Liabilities, Intangible Assets Summary of Cash and Available-For-Sale Securities Debt Securities, Available-for-Sale [Table Text Block] Amortized Cost Debt Securities, Available-for-Sale, Amortized Cost, Fiscal Year Maturity [Abstract] Noncontrolling Interest in Joint Venture Noncontrolling Interest [Member] Tax Credit Carryforward [Axis] Tax Credit Carryforward [Axis]